Micromachined Diaphragms with Integrated Actuation Coils
نویسندگان
چکیده
This paper presents a process for fabricating diaphragms, suitable for use in micromachined pumps within the field of micro-fluidics. To enable the actuation of a thick-film deposited magnetostrictive material, actuation coils are fabricated onto the non-chamber face of the diaphragms. These actuation coils are fabricated using a multilayer deposition approach compatible with micromachining processes. The selection of diaphragm and actuation region dimensions has been achieved through the use of finite element modeling. The paper also describes the fabrication process used to realize the structures.
منابع مشابه
Micromachined Microphones with Diffraction-based Optical Interferometric Readout and Electrostatic Actuation
Micromachined microphones that use a diffraction-based optical method for integrated interferometric detection of diaphragm displacement are described. With optoelectronics integration, this approach yields highly sensitive microphones in mm-cube volumes. Furthermore, the electrical port of the device, which is freed by optical detection, is used for electrostatic actuation of the microphone di...
متن کاملMagnetic energy coupling system based on micro-electro-mechanical system coils
Related Articles Optical actuation of microelectromechanical systems using photoelectrowetting Appl. Phys. Lett. 100, 224103 (2012) Magnetostatic detection using magnetoresistive sensors with vertical motion flux modulation Rev. Sci. Instrum. 83, 055009 (2012) Mode characterization of sub-micron equilateral triangular microcavity including material’s dispersion effects J. Appl. Phys. 111, 10311...
متن کاملPiezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging
Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents ...
متن کاملPlastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures
Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive at the elevated temperature, the silicon structures must work in combination with other advanced...
متن کاملMagnetic Actuation of Hinged Microstructures
We have investigated magnetic actuation of hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material ...
متن کامل